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Evaporation of Adherent Al-Films on Single Crystalline LiNbO3 Substrates
Adherent Al-Films Single Crystalline LiNbO3 Substrates
2010/12/16
LiNbO3 is used as a single crystalline substrate material for the manufacturing of surface acoustic wave devices as frequency selective components. On the polished substrate wafer, Al with a film thic...