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Focus on Novel Nanoelectromechanical 3D Structures: Fabrication and Properties
Novel Nanoelectromechanical 3D Structures Fabrication Properties
2010/1/19
Microelectromechanical systems (MEMS) are widely used small electromechanical systems made of micrometre-sized components. Presently, we are witnessing a transition from MEMS to nanoelectromechanical ...