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On chip, high-sensitivity thermal sensor based on high-Q polydimethylsiloxane-coated microresonator
chip high-sensitivity thermal sensor high-Q polydimethylsiloxane-coated microresonator
2010/11/12
A high-sensitivity thermal sensing is demonstrated by coating a layer of polydimethylsiloxane (PDMS) on the surface of a silica toroidal microresonator on a silicon wafer. Possessing high-Q whisperin...